CA1179751A - Controlling metal electro-deposition using electrolyte containing, two polarizing agents - Google Patents
Controlling metal electro-deposition using electrolyte containing, two polarizing agentsInfo
- Publication number
- CA1179751A CA1179751A CA000393685A CA393685A CA1179751A CA 1179751 A CA1179751 A CA 1179751A CA 000393685 A CA000393685 A CA 000393685A CA 393685 A CA393685 A CA 393685A CA 1179751 A CA1179751 A CA 1179751A
- Authority
- CA
- Canada
- Prior art keywords
- cathode
- overpotential
- metal
- nucleation
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003795 chemical substances by application Substances 0.000 title claims abstract description 100
- 239000003792 electrolyte Substances 0.000 title claims abstract description 84
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 80
- 239000002184 metal Substances 0.000 title claims abstract description 80
- 238000004070 electrodeposition Methods 0.000 title claims abstract description 19
- 238000007747 plating Methods 0.000 claims abstract description 88
- 238000000034 method Methods 0.000 claims abstract description 71
- 238000010899 nucleation Methods 0.000 claims abstract description 70
- 230000006911 nucleation Effects 0.000 claims abstract description 70
- 230000008569 process Effects 0.000 claims abstract description 30
- 230000007704 transition Effects 0.000 claims description 20
- 238000001465 metallisation Methods 0.000 claims description 14
- 230000003247 decreasing effect Effects 0.000 claims description 13
- 230000001965 increasing effect Effects 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 11
- 238000007670 refining Methods 0.000 claims description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- LWUVWAREOOAHDW-UHFFFAOYSA-N lead silver Chemical compound [Ag].[Pb] LWUVWAREOOAHDW-UHFFFAOYSA-N 0.000 claims description 2
- 230000002999 depolarising effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract 1
- 238000004886 process control Methods 0.000 abstract 1
- 238000007792 addition Methods 0.000 description 20
- 239000011133 lead Substances 0.000 description 16
- 239000000523 sample Substances 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- 239000010949 copper Substances 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000000203 mixture Substances 0.000 description 10
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 10
- 230000010287 polarization Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000003292 glue Substances 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 241001116389 Aloe Species 0.000 description 6
- 229920001732 Lignosulfonate Polymers 0.000 description 6
- 235000011399 aloe vera Nutrition 0.000 description 6
- 230000001276 controlling effect Effects 0.000 description 6
- 150000002739 metals Chemical group 0.000 description 6
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 230000000875 corresponding effect Effects 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 239000010406 cathode material Substances 0.000 description 3
- 238000005363 electrowinning Methods 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229920005610 lignin Polymers 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 description 2
- 229910000368 zinc sulfate Inorganic materials 0.000 description 2
- 229960001763 zinc sulfate Drugs 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241001421757 Arcas Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 201000003639 autosomal recessive cerebellar ataxia Diseases 0.000 description 1
- 229950011260 betanaphthol Drugs 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229940075397 calomel Drugs 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000002484 cyclic voltammetry Methods 0.000 description 1
- ZOMNIUBKTOKEHS-UHFFFAOYSA-L dimercury dichloride Chemical compound Cl[Hg][Hg]Cl ZOMNIUBKTOKEHS-UHFFFAOYSA-L 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000002659 electrodeposit Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-L thiosulfate(2-) Chemical compound [O-]S([S-])(=O)=O DHCDFWKWKRSZHF-UHFFFAOYSA-L 0.000 description 1
- 150000004764 thiosulfuric acid derivatives Chemical class 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 235000009529 zinc sulphate Nutrition 0.000 description 1
- 239000011686 zinc sulphate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
- C25C7/00—Constructional parts, or assemblies thereof, of cells; Servicing or operating of cells
- C25C7/06—Operating or servicing
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Automation & Control Theory (AREA)
- Electrolytic Production Of Metals (AREA)
- Electroplating Methods And Accessories (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000393685A CA1179751A (en) | 1982-01-07 | 1982-01-07 | Controlling metal electro-deposition using electrolyte containing, two polarizing agents |
| US06/422,438 US4443301A (en) | 1982-01-07 | 1982-09-23 | Controlling metal electro-deposition using electrolyte containing two polarizing agents |
| JP58000275A JPS58120791A (ja) | 1982-01-07 | 1983-01-06 | ２つの分極剤を含有する電解液を使用する金属電着の制御方法 |
| AU10062/83A AU552731B2 (en) | 1982-01-07 | 1983-01-06 | Metal electro-deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000393685A CA1179751A (en) | 1982-01-07 | 1982-01-07 | Controlling metal electro-deposition using electrolyte containing, two polarizing agents |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1179751A true CA1179751A (en) | 1984-12-18 |
Family
ID=4121767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000393685A Expired CA1179751A (en) | 1982-01-07 | 1982-01-07 | Controlling metal electro-deposition using electrolyte containing, two polarizing agents |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4443301A (en]) |
| JP (1) | JPS58120791A (en]) |
| AU (1) | AU552731B2 (en]) |
| CA (1) | CA1179751A (en]) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1231137A (en) * | 1985-09-12 | 1988-01-05 | Ian H. Warren | Method for monitoring the quality of znso.sub.4 electrolyte containing sb (v) |
| JPH07840B2 (ja) * | 1985-11-25 | 1995-01-11 | 大和特殊株式会社 | 電気めつき添加剤の管理方法並びにそのための装置 |
| US4812210A (en) * | 1987-10-16 | 1989-03-14 | The United States Department Of Energy | Measuring surfactant concentration in plating solutions |
| US5223118A (en) * | 1991-03-08 | 1993-06-29 | Shipley Company Inc. | Method for analyzing organic additives in an electroplating bath |
| CA2087801C (en) * | 1993-01-21 | 1996-08-13 | Noranda Ipco Inc. | Method and apparatus for on-line monitoring the quality of a purified metal sulphate solution |
| US6683446B1 (en) * | 1998-12-22 | 2004-01-27 | John Pope | Electrode array for development and testing of materials |
| EP1881091A1 (de) * | 2006-07-21 | 2008-01-23 | Enthone, Inc. | Verfahren und Vorrichtung zur Kontrolle von Abscheideergebnissen auf Substratoberflächen |
| JP5281062B2 (ja) * | 2010-09-27 | 2013-09-04 | Ｊｘ日鉱日石金属株式会社 | 鉛の電解方法 |
| BR112013015700A2 (pt) * | 2010-12-21 | 2016-10-11 | Coatings Foreign Ip Co Llc | processo de avaliação da resistência à corrosão |
| CN111188046B (zh) * | 2020-03-03 | 2025-04-29 | 碳能科技（北京）有限公司 | 三腔室电化学反应器 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916013A (en]) * | 1972-06-06 | 1974-02-13 | ||
| US3925168A (en) * | 1972-07-26 | 1975-12-09 | Anaconda American Brass Co | Method of monitoring the active roughening agent in a copper plating bath |
| JPS5421819B2 (en]) * | 1973-06-19 | 1979-08-02 | ||
| JPS5122152A (en]) * | 1974-08-16 | 1976-02-21 | Hitachi Ltd | |
| CA1064852A (en) * | 1975-12-31 | 1979-10-23 | Cominco Ltd. | Method for evaluating a system for electrodeposition of metals |
| US4132605A (en) * | 1976-12-27 | 1979-01-02 | Rockwell International Corporation | Method for evaluating the quality of electroplating baths |
| CA1111125A (en) * | 1978-07-05 | 1981-10-20 | Robert C. Kerby | Method and apparatus for control of electrowinning of zinc |
| JPS563677A (en) * | 1979-06-19 | 1981-01-14 | Hitachi Ltd | Method and apparatus for controlling chemical treating fluid |
| CA1174200A (en) * | 1979-07-27 | 1984-09-11 | Robert C. Kerby | Method and apparatus for controlling the quality of zinc sulfate electrolyte |
| US4324621A (en) * | 1979-12-26 | 1982-04-13 | Cominco Ltd. | Method and apparatus for controlling the quality of electrolytes |
-
1982
- 1982-01-07 CA CA000393685A patent/CA1179751A/en not_active Expired
- 1982-09-23 US US06/422,438 patent/US4443301A/en not_active Expired - Fee Related
-
1983
- 1983-01-06 AU AU10062/83A patent/AU552731B2/en not_active Ceased
- 1983-01-06 JP JP58000275A patent/JPS58120791A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| US4443301A (en) | 1984-04-17 |
| AU552731B2 (en) | 1986-06-19 |
| JPH0525957B2 (en]) | 1993-04-14 |
| AU1006283A (en) | 1983-07-14 |
| JPS58120791A (ja) | 1983-07-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEC | Expiry (correction) | ||
| MKEX | Expiry |